

产品标准:Q/KAIHN01-2009
相对分子质量:20.01
分子式:HF-H20
产品用途:主要用于集成电路工业中芯片清洗与腐蚀,是微电子技术加工过程中不可缺少的关键化学品之一;也用于液晶显示器(TFT-LCD)行业中对玻璃基板、氮化硅、二氧化硅蚀剂、二氧化硅蚀刻;还用于太阳能电池行业硅表面清洗、蚀剂。
理化性质:为无色透明液体,呈弱酸性,有强烈的刺激性气味,强腐蚀。浓度50%的氢氟酸密度为1.157g/ml,在大气压下沸点为107℃,冰点为-46.3℃,常温下比热3.1J/g℃,18℃时,当量电导率为17.32Ω-1cm-1。与金属盐、氧化物和氢氧化物作用产生氢化盐,能侵蚀玻璃和硅酸盐而生成气态的四氟化硅。
包装规格:1000L IBC集装桶;200L桶;20L桶;5L加仑桶
贮藏和运输:运输过程中避免撞击,防止阳光直射,储存于阴凉、通风仓库,保持容器密封。
产品质量标准:
| 级别 | UP-S级 | UP级 | EL级 | |
| 项目ITEM | 单位UNIT | 指标 | 指标 | 指标 |
| 含量ASSAY | % | 49%±0.5 | 49%±0.5 | 49%±0.5 |
| 氟硅酸(H2SiF6) | mg/L | ≤100 | ≤100 | ≤100 |
| 氧化物(CL) | mg/L | ≤5 | ≤5 | ≤5 |
| 硝酸盐(NO3) | mg/L | ≤3 | ≤3 | ≤3 |
| 磷酸盐(PO4) | mg/L | ≤1 | ≤1 | ≤1 |
| 硫酸盐和亚硫酸盐 | mg/L | ≤5 | ≤5 | ≤5 |
| 色度COLOR | HAZEN | ≤10 | ≤10 | ≤10 |
| 颗粒(≥1.0μm) | Ea/ml | ≤10 | ≤25 | ≤25 |
| 砷As | PPB | ≤1 | ≤10 | ≤100 |
| 锂Li | PPB | ≤1 | ≤10 | ≤100 |
| 钠Na | PPB | ≤1 | ≤10 | ≤100 |
| 镁Mg | PPB | ≤1 | ≤10 | ≤100 |
| 铝Al | PPB | ≤1 | ≤10 | ≤100 |
| 钾K | PPB | ≤1 | ≤10 | ≤100 |
| 钙Ca | PPB | ≤1 | ≤10 | ≤100 |
| 铬Cr | PPB | ≤1 | ≤10 | ≤100 |
| 铁Fe | PPB | ≤1 | ≤10 | ≤100 |
| 钴Co | PPB | ≤1 | ≤10 | ≤100 |
| 镍Ni | PPB | ≤1 | ≤10 | ≤100 |
| 铜Cu | PPB | ≤1 | ≤10 | ≤100 |
| 锌Zn | PPB | ≤1 | ≤10 | ≤100 |
| 镓Ga | PPB | ≤1 | ≤10 | ≤100 |
| 钼Mo | PPB | ≤1 | ≤10 | ≤100 |
| 银Ag | PPB | ≤1 | ≤10 | ≤100 |
| 镉Cd | PPB | ≤1 | ≤10 | ≤100 |
| 锡Sn | PPB | ≤1 | ≤10 | ≤100 |
| 钡Ba | PPB | ≤1 | ≤10 | ≤100 |
| 铂Pt | PPB | ≤1 | ≤10 | ≤100 |
| 金Au | PPB | ≤1 | ≤10 | ≤100 |
| 锰Mn | PPB | ≤1 | ≤10 | ≤100 |
| 铅Pb | PPB | ≤1 | ≤10 | ≤100 |
| 铊Ti | PPB | ≤1 | ≤10 | ≤100 |
| 铍Be | PPB | ≤1 | ≤10 | ≤100 |
| 硼B | PPB | ≤1 | ≤10 | ≤100 |
| 矾V | PPB | ≤1 | ≤10 | ≤100 |
| 锗Ge | PPB | ≤1 | ≤10 | ≤100 |
| 锶Sr | PPB | ≤1 | ≤10 | ≤100 |
| 锆Zr | PPB | ≤1 | ≤10 | ≤100 |
| 铋Bi | PPB | ≤1 | ≤10 | ≤100 |
| 锑Sb | PPB | ≤1 | ≤10 | ≤100 |
{{item.AppContent}}